Overcoming limitations of nanomechanical resonators with simultaneous resonances

نویسندگان

  • Najib Kacem
  • Sébastien Baguet
  • Laurent Duraffourg
  • G Jourdan
  • Régis Dufour
  • Sébastien Hentz
  • N. Kacem
  • S. Baguet
  • S. Hentz
چکیده

Dynamic stabilization by simultaneous primary and superharmonic resonances for high order nonlinearity cancellation is demonstrated with an electrostatically-actuated, piezoresistively-transduced nanomechanical resonator. We prove experimentally how the combination of both the third-order nonlinearity cancellation and simultaneous resonances can be used to linearly drive a nanocantilever up to very large amplitudes compared to fundamental limits like pull-in occurrence, opening the way towards resonators with high frequency stability for high-performance sensing or time reference. PACS numbers: 85.85.+j, 05.45.-a, 46.40.Ff, 46.15.Ff

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تاریخ انتشار 2017